Optimization of a miniaturized ceramic differential scanning calorimeter device

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Brandenburg, Annica ; Kita, Jaroslaw ; Wappler, Eberhard ; Moos, Ralf:
Optimization of a miniaturized ceramic differential scanning calorimeter device.
2013
Veranstaltung: 37th International Microelectronics and Packaging IMAPS Conference , 22.-25.09.2013 , Kraków, Poland.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung , Sonstige Präsentationstyp)

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Abstract

An optimization process of an existing miniaturized ceramic differential scanning calorimeter device (MC-DSC) is presented. The MC-DSC is manufactured in thick-film and low temperature co-fired ceramics technology (LTCC) which offers simple stacking of single structured LTCC layers to a complex three-dimensional electrical device including all functions of a conventional DSC apparatus on a chip of a miniaturized size of 11 mm × 39 mm × 1.5 mm. In our last works we demonstrated the functionality of the MC-DSC chip - the presented data showed a good reproducibility as well as high selectivity for analyzed samples of indium, tin and zinc. With focus on lowering the power consumption and increasing of the temperature homogeneity, we set up a simulation-based optimization process to redesign the basic structure as well as the heater geometry.