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Frequency-tripled Nd : YAG-laser in thick-film and LTTC applications

Title data

Gollner, Egmont ; Kita, Jaroslaw ; Moos, Ralf:
Frequency-tripled Nd : YAG-laser in thick-film and LTTC applications.
2006
Event: 30. International Conference of International Microelectronics and Packaging Society (IMAPS) , 24.-27.09.2006 , Krakow, Poland.
(Conference item: Conference , Other Presentation type)

Abstract in another language

This contribution deals with the possibilities and limitations of laser processing in thick film technology and ceramic substrate structuring. The advantages of shorter wavelength of a frequency tripled Nd:YAG laser, a Microline 350L series from LPKF, are shown. Surface features as fine as 20 μm have been produced and 3D structures have been made from green tape (up to a thickness of 2 mm) and fired ceramics (up to a thickness of 635 μm). Some comparison in structure quality between standard Nd:YAG (1064 nm) and frequency tripled Nd:YAG (355 nm) lasers are given. The discussion considers the optical quality of the 3D structures in conjunction with the electric properties of the surface thick-film structures.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 09 Jun 2015 08:09
Last Modified: 06 Apr 2016 06:45
URI: https://eref.uni-bayreuth.de/id/eprint/14858