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Integration of Fired Ceramics on LTCC Structures - Feasibility Study

Title data

Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf:
Integration of Fired Ceramics on LTCC Structures - Feasibility Study.
2006
Event: 4th European Microelectronics and Packaging Symposium , 21.-24.05.2006 , Terme Catez, Slovenia.
(Conference item: Conference , Other Presentation type)

Abstract in another language

Zero-shrinkage LTCC tapes allow to manufacture LTCC microsystems that include an integrated sintered ceramic component without an additional firing step. In previous papers, it has been shown that green zero-shrinkage LTCC tapes can be joined with conventional 96% alumina ceramics by applying a ceramic binder, laminating the compound, and co-firing all together. In this contribution the feasibility of joining different ceramic composites as well as borosilicate glass with zero shrinkage LTCC tapes is demonstrated. The technological process steps as well as the influence of process parameters (lamination, firing profiles) and their influence on structure quality are discussed. Results of SEM microstructure analyses of LTCC ceramics and solid components in dependence of firing conditions are shown.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 17 Jun 2015 07:15
Last Modified: 06 Apr 2016 06:43
URI: https://eref.uni-bayreuth.de/id/eprint/14981