Title data
Acker, Heinrich ; Knezevic, Aleksandar ; Moos, Ralf ; Müller, Ralf:
Stoffsensor.
DE10041921 (2000)
Abstract in another language
Die Erfindung betrifft einen Stoffsensor, insbesondere Gassensor, umfassend
- ein Substrat oder eine Trägerschicht,
- eine auf dem Substrat oder der Trägerschicht aufgebrachte Kondensatorstruktur mit zwei, auf unterschiedlichem Potential liegenden Elektroden,
- eine Sensorfunktionsschicht in Kontakt mit der Kondensatorstruktur,
- einen elektrischen Widerstand zur Temperaturmessung oder Sensorheizung.
Erfindungsgemäß bildet der elektrische Widerstand zur Temperaturmessung oder Sensorheizung zugleich eine der Elektroden der Kondensatorstruktur.
Abstract in another language
A sensor includes an electrical resistance for heating and temperature measurement, which simultaneously forms a condenser electrode An Independent claim is included for the production of the sensor, in which a closed, or already pre-structured electrically-conductive layer is applied using thick layer technology, as a condenser precursor. This is then structured photolithographically. Preferred Features: A single electrode of the condenser structure is formed by two others. These (44, 46) interdigitate. Between the interdigitating electrodes (IEs), a resistance (42) meanders, for temperature measurement and/or heating. The resistance includes a section (40) outside the condenser IEs. One or both IEs and/or a further electrode are used for heating and/or temperature measurement.
Further data
Item Type: | Patent |
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Patent Applicant: | Dornier GmbH, 88039 Friedrichshafen |
Date of the patent's registration: | 25 August 2000 |
Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT Faculties Faculties > Faculty of Engineering Science > Chair Functional Materials Profile Fields Profile Fields > Advanced Fields Research Institutions Research Institutions > Research Centres |
Result of work at the UBT: | No |
DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
Date Deposited: | 07 Dec 2015 07:57 |
Last Modified: | 04 Apr 2016 08:04 |
URI: | https://eref.uni-bayreuth.de/id/eprint/24706 |