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Stoffsensor

Title data

Acker, Heinrich ; Knezevic, Aleksandar ; Moos, Ralf ; Müller, Ralf:
Stoffsensor.
DE10041921 (2000)

Official URL: Volltext

Abstract in another language

Die Erfindung betrifft einen Stoffsensor, insbesondere Gassensor, umfassend
- ein Substrat oder eine Trägerschicht,
- eine auf dem Substrat oder der Trägerschicht aufgebrachte Kondensatorstruktur mit zwei, auf unterschiedlichem Potential liegenden Elektroden,
- eine Sensorfunktionsschicht in Kontakt mit der Kondensatorstruktur,
- einen elektrischen Widerstand zur Temperaturmessung oder Sensorheizung.

Erfindungsgemäß bildet der elektrische Widerstand zur Temperaturmessung oder Sensorheizung zugleich eine der Elektroden der Kondensatorstruktur.

Abstract in another language

A sensor includes an electrical resistance for heating and temperature measurement, which simultaneously forms a condenser electrode An Independent claim is included for the production of the sensor, in which a closed, or already pre-structured electrically-conductive layer is applied using thick layer technology, as a condenser precursor. This is then structured photolithographically. Preferred Features: A single electrode of the condenser structure is formed by two others. These (44, 46) interdigitate. Between the interdigitating electrodes (IEs), a resistance (42) meanders, for temperature measurement and/or heating. The resistance includes a section (40) outside the condenser IEs. One or both IEs and/or a further electrode are used for heating and/or temperature measurement.

Further data

Item Type: Patent
Patent Applicant: Dornier GmbH, 88039 Friedrichshafen
Date of the patent's registration: 25 August 2000
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: No
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 07 Dec 2015 07:57
Last Modified: 04 Apr 2016 08:04
URI: https://eref.uni-bayreuth.de/id/eprint/24706