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Sound velocity of AlₓGa₁−ₓN thin films obtained by surface acoustic-wave measurements

Title data

Deger, C. ; Born, Eberhard ; Angerer, Helmut ; Ambacher, Oliver ; Stutzmann, Martin ; Hornsteiner, Jörg ; Riha, Evelyn ; Fischerauer, Gerhard:
Sound velocity of AlₓGa₁−ₓN thin films obtained by surface acoustic-wave measurements.
In: Applied Physics Letters. Vol. 72 (11 May 1998) Issue 19 . - pp. 2400-2402.
ISSN 1077-3118
DOI: https://doi.org/10.1063/1.121368

Abstract in another language

To determine the sound velocity in wurtzite Al_{x}Ga_{1-x}N, we have used surface acoustic-wave
(SAW) delay lines on Al_{x}Ga_{1-x}N/c-Al2O3. Al_{x}Ga_{1-x}N films with compositions from x=0 to
x=1 were grown by plasma-induced molecular beam epitaxy. Starting from published data, we fine tuned the values of the elastic moduli used in numerical calculations such that the simulated and measured dispersion of the SAW were in good agreement. Based on these values, the surface and bulk acoustic-wave velocities of single-crystal Al_{x}Ga_{1-x}N were determined as functions of the composition. The resulting SAW velocities ranged from 3700 to 5760 m/s for GaN and AlN, respectively.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 25 Feb 2016 11:51
Last Modified: 25 Feb 2016 11:51
URI: https://eref.uni-bayreuth.de/id/eprint/31132