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Visualization of microacoustic waves by laser interferometry

Title data

Gollwitzer, Andreas ; Fischerauer, Gerhard:
Visualization of microacoustic waves by laser interferometry.
In: Chiba University, Japan (ed.): Proceedings of the Fourth International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems. - Chiba, Japan : Selbstverlag Chiba University , 2010 . - pp. 29-36

Abstract in another language

This contribution reports on a modified homodyne Michelson interferometer that, together with a precision translation stage, enables one to scan the surface of microacoustic devices and to measure the absolute amplitude and phase of vibrations on that surface. Dedicated signal processing algorithms serve to eliminate the influence of path length variations in the two interferometer arms which would otherwise disturb the amplitude measurement. The setup is used to visualize SAW generation, propagation, and scattering phenomena in typical devices, and to extract material parameters such as wave velocities and electroacoustic coupling factors.

Further data

Item Type: Article in a book
Refereed: No
Keywords: Laser acoustics; Michelson interferometer; homodyne; signal processing; SAW
Institutions of the University: Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 10 Jun 2016 08:41
Last Modified: 10 Jun 2016 08:41
URI: https://eref.uni-bayreuth.de/id/eprint/32644