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Gollwitzer, Andreas ; Haugg, Susanne ; Fischerauer, Gerhard:
An Auto-Focusing Approach for a Dynamic Quadrature Interferometer.
In:
AMA Service GmbH
(Hrsg.):
Proceedings OPTO 2009 & IRS² 2009 : 9th International Conference on Optical Technologies for Sensing and Measurement & 11th International Conference on Infrared Sensors & Systems. -
Wunstorf
: AMA Service GmbH
,
2009
. - S. 29-34
ISBN 978-3-9810993-6-2
DOI: https://doi.org/10.5162/opto09/o1.2
Abstract
The measurement of surface vibrations with small amplitudes is often accomplished using interferometric techniques. For a good local resolution of the vibration amplitudes, the laser beam has to be focused on the surface through a high magnification lens. Owing to the small depth of focus of this lens, its distance to the surface has to be controlled accurately and precisely. In order to get rid of the frequency shifting parts of a heterodyne interferometer and to simultaneously eliminate the effects of noise sources such as fluctuations in the surface reflectivity of the device under test, we use a homodyne setup with additional path length modulation. The sensitivity of the setup is increased by quadrature interferometry, i. e., the synchronous measurement of the intensities detected by two photodiodes. We also present a signal processing technique for the control of the distance between lens and surface; this makes sure that the laser beam is optimally focused onto the surface and leads to a high overall signal-to-noise ratio.
Weitere Angaben
| Publikationsform: | Aufsatz in einem Buch |
|---|---|
| Begutachteter Beitrag: | Nein |
| Institutionen der Universität: | Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 13 Jun 2016 08:34 |
| Letzte Änderung: | 13 Jun 2016 08:34 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/32660 |