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Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Title data

Nowak, Damian ; Miś, Edward ; Dziedzic, Andrzej ; Kita, Jaroslaw:
Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors.
In: Microelectronics Reliability. Vol. 49 (2009) Issue 6 . - pp. 600-606.
ISSN 0026-2714
DOI: https://doi.org/10.1016/j.microrel.2009.02.019

Official URL: Volltext

Abstract in another language

The dimensions of discrete passives, passive integrated components (arrays, networks) and embedded integral ones should be reduced significantly in the nearest future. Therefore the relations between technological accuracy and limitations, minimal geometrical dimensions and electrical as well as stability properties become more and more important. This paper presents systematic studies of thick-film or LTCC microresistors made with the aid of laser shaping. The investigations are concerned with miniaturization of two resistor dimensions, namely length (down to 30 μm) and width (also down to 30 μm). The sheet resistance, hot temperature coefficient of resistance (HTCR) as well as long-term stability and durability of test structures to various short electrical pulses were related to geometrical properties of microresistors. Such investigations proved that combining of current materials and fabrication methods used in modern thick-film and LTCC technologies with laser shaping made possible fabrication of 30 × 30 μm2 microresistors with satisfactory electrical properties and can serve as interesting alternative for thick-film and LTCC resistors miniaturization.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 26 Jan 2015 09:52
Last Modified: 11 Apr 2016 09:23
URI: https://eref.uni-bayreuth.de/id/eprint/5689