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Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors

Titelangaben

Nowak, Damian ; Miś, Edward ; Dziedzic, Andrzej ; Kita, Jaroslaw:
Fabrication and electrical properties of laser-shaped thick-film and LTCC microresistors.
In: Microelectronics Reliability. Bd. 49 (2009) Heft 6 . - S. 600-606.
ISSN 0026-2714
DOI: https://doi.org/10.1016/j.microrel.2009.02.019

Volltext

Link zum Volltext (externe URL): Volltext

Abstract

The dimensions of discrete passives, passive integrated components (arrays, networks) and embedded integral ones should be reduced significantly in the nearest future. Therefore the relations between technological accuracy and limitations, minimal geometrical dimensions and electrical as well as stability properties become more and more important. This paper presents systematic studies of thick-film or LTCC microresistors made with the aid of laser shaping. The investigations are concerned with miniaturization of two resistor dimensions, namely length (down to 30 μm) and width (also down to 30 μm). The sheet resistance, hot temperature coefficient of resistance (HTCR) as well as long-term stability and durability of test structures to various short electrical pulses were related to geometrical properties of microresistors. Such investigations proved that combining of current materials and fabrication methods used in modern thick-film and LTCC technologies with laser shaping made possible fabrication of 30 × 30 μm2 microresistors with satisfactory electrical properties and can serve as interesting alternative for thick-film and LTCC resistors miniaturization.

Weitere Angaben

Publikationsform: Artikel in einer Zeitschrift
Begutachteter Beitrag: Ja
Institutionen der Universität: Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos
Fakultäten
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien
Profilfelder > Advanced Fields > Neue Materialien
Forschungseinrichtungen > Forschungszentren > Bayreuther Materialzentrum - BayMAT
Profilfelder
Profilfelder > Advanced Fields
Forschungseinrichtungen
Forschungseinrichtungen > Forschungszentren
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 26 Jan 2015 09:52
Letzte Änderung: 11 Apr 2016 09:23
URI: https://eref.uni-bayreuth.de/id/eprint/5689