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A Novel Method for the Visualization of Vibrations in Surface Acoustic Wave Devices

Title data

Gollwitzer, Andreas ; Fischerauer, Gerhard:
A Novel Method for the Visualization of Vibrations in Surface Acoustic Wave Devices.
In: Proceedings Sensor Conference 2007 : 13th international conference. Volume 2. - Wunstorf : AMA Service , 2007 . - pp. 81-86
ISBN 978-3-9810993-2-4

Abstract in another language

We have realized a setup capable of measuring the amplitude and phase of vibrations in surface acoustic wave (SAW) devices. It consists of a modified Michelson interferometer and a vector network analyzer (VNA). This combination and additional signal processing make it possible to detect the complex amplitude of a harmonic displacement on the surface of a SAW device. We discuss this technique and explain our setup with an upper frequency limit in the gigahertz range, a minimum detectable displacement amplitude of 50 pm and a lateral resolution of about 500 nm. We demonstrate our setup by showing 2D pictures of the complex amplitude of a SAW propagating over an interdigital transducer (IDT) region and comparing the results with a calculation of the phase of the SAW in this area. We also show, how to obtain the piezoelectric coupling coefficient of the Rayleigh wave in the observed material.

Further data

Item Type: Article in a book
Refereed: No
Institutions of the University: Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 12 Nov 2021 12:49
Last Modified: 12 Nov 2021 12:49
URI: https://eref.uni-bayreuth.de/id/eprint/67783