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Atmospheric pressure microwave plasma fluidized bed CVD of AlN coatings


Pajkić, Zeljko ; Willert-Porada, Monika:
Atmospheric pressure microwave plasma fluidized bed CVD of AlN coatings.
In: Surface and Coatings Technology. Bd. 203 (Juli 2009) Heft 20/21 . - 3168 - 3172.
ISSN 0257-8972
DOI: https://doi.org/10.1016/j.surfcoat.2009.03.047


Link zum Volltext (externe URL): Volltext


A fluidized bed chemical vapor deposition (CVD) process for depositing thin AlN coatings on particulate substrates was developed. Short carbon fibers were fluidized in nitrogen at atmospheric pressure and charged with microwaves at 2.45 GHz frequency. In the resulting nitrogen plasma, the coatings that composed mainly of AlN, were deposited from trimethylaluminum (TMA) in temperature range of 400–900 °C. Produced coatings were further characterized by scanning electron microscopy, X-ray diffraction, and thermogravimetric analysis. Decomposition of TMA, further chemical reactions, and the role of the microwave plasma were studied, and the process deposition rates were determined. It was found that the coated short carbon fibers exhibit enhanced oxidation resistance at high temperatures in air as compared to the starting material. A mechanism of coated carbon fiber oxidation was postulated to interpret these findings.

Weitere Angaben

Publikationsform: Artikel in einer Zeitschrift
Begutachteter Beitrag: Ja
Keywords: X-ray diffraction; Organometallic CVD; Microwave;Carbon; Aluminum nitride
Institutionen der Universität: Fakultäten
Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Werkstoffverarbeitung
Fakultäten > Fakultät für Ingenieurwissenschaften > Ehemalige Professoren > Lehrstuhl Werkstoffverarbeitung - Univ.-Prof. Dr. Monika Willert-Porada
Forschungseinrichtungen > Forschungsstellen > ZET - Zentrum für Energietechnik
Forschungseinrichtungen > Forschungsstellen
Fakultäten > Fakultät für Ingenieurwissenschaften > Ehemalige Professoren
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 500 Naturwissenschaften und Mathematik > 500 Naturwissenschaften
600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 16 Feb 2015 12:05
Letzte Änderung: 04 Mai 2015 14:56
URI: https://eref.uni-bayreuth.de/id/eprint/6820