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Atmospheric pressure microwave plasma fluidized bed CVD of AlN coatings

Title data

Pajkić, Zeljko ; Willert-Porada, Monika:
Atmospheric pressure microwave plasma fluidized bed CVD of AlN coatings.
In: Surface and Coatings Technology. Vol. 203 (July 2009) Issue 20/21 . - 3168 - 3172.
ISSN 0257-8972
DOI: https://doi.org/10.1016/j.surfcoat.2009.03.047

Official URL: Volltext

Abstract in another language

A fluidized bed chemical vapor deposition (CVD) process for depositing thin AlN coatings on particulate substrates was developed. Short carbon fibers were fluidized in nitrogen at atmospheric pressure and charged with microwaves at 2.45 GHz frequency. In the resulting nitrogen plasma, the coatings that composed mainly of AlN, were deposited from trimethylaluminum (TMA) in temperature range of 400–900 °C. Produced coatings were further characterized by scanning electron microscopy, X-ray diffraction, and thermogravimetric analysis. Decomposition of TMA, further chemical reactions, and the role of the microwave plasma were studied, and the process deposition rates were determined. It was found that the coated short carbon fibers exhibit enhanced oxidation resistance at high temperatures in air as compared to the starting material. A mechanism of coated carbon fiber oxidation was postulated to interpret these findings.

Further data

Item Type: Article in a journal
Refereed: Yes
Keywords: X-ray diffraction; Organometallic CVD; Microwave;Carbon; Aluminum nitride
Institutions of the University: Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Materials Processing
Faculties > Faculty of Engineering Science > Ehemalige Professoren > Chair Materials Processing - Univ.-Prof. Dr. Monika Willert-Porada
Research Institutions > Research Units > ZET - Zentrum für Energietechnik
Research Institutions
Research Institutions > Research Units
Faculties > Faculty of Engineering Science > Ehemalige Professoren
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 500 Natural sciences
600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 16 Feb 2015 12:05
Last Modified: 04 May 2015 14:56
URI: https://eref.uni-bayreuth.de/id/eprint/6820