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Ionov, Leonid ; Diez, Stefan:
Environment-Friendly Photolithography Using Poly(N-isopropylacrylamide)-Based Thermoresponsive Photoresists.
In: Journal of the American Chemical Society.
Bd. 131
(2009)
Heft 37
.
- S. 13315-13319.
ISSN 1520-5126
DOI: https://doi.org/10.1021/ja902660s
Abstract
We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.
Weitere Angaben
| Publikationsform: | Artikel in einer Zeitschrift |
|---|---|
| Begutachteter Beitrag: | Ja |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften > Professur Biofabrikation > Professur Biofabrikation - Univ.-Prof. Dr. Leonid Ionov Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Professur Biofabrikation |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 500 Naturwissenschaften und Mathematik > 540 Chemie |
| Eingestellt am: | 21 Jun 2017 12:22 |
| Letzte Änderung: | 09 Mär 2022 14:20 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/37715 |