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Environment-Friendly Photolithography Using Poly(N-isopropylacrylamide)-Based Thermoresponsive Photoresists

Title data

Ionov, Leonid ; Diez, Stefan:
Environment-Friendly Photolithography Using Poly(N-isopropylacrylamide)-Based Thermoresponsive Photoresists.
In: Journal of the American Chemical Society. Vol. 131 (2009) Issue 37 . - pp. 13315-13319.
ISSN 1520-5126
DOI: https://doi.org/10.1021/ja902660s

Abstract in another language

We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.We report a novel approach for the temperature-triggered development of water-soluble photoresists based on photocleavable poly(N-isopropylacrylamide) copolymers. These copolymers are soluble in an aqueous environment below their Lower Critical Solution Temperature (LCST). Upon UV irradiation, the photocleavable groups are deprotected resulting in an increased LCST. Thus, the illuminated parts of spin-coated copolymer layers dissolve at higher temperatures than the surrounding areas, leading to pattern development. The photoresist can finally be completely removed at low temperature. We demonstrate the applicability of this novel photolithographic approach by the patterning of fluorescent proteins.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science > Professor Biofabrication > Professor Biofabrication - Univ.-Prof. Dr. Leonid Ionov
Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Professor Biofabrication
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 21 Jun 2017 12:22
Last Modified: 09 Mar 2022 14:20
URI: https://eref.uni-bayreuth.de/id/eprint/37715