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Silver Metallization with Controlled Etch Stop Using SiOₓ Layers in Passivating Contacts for Improved Silicon Solar Cell Performance

Title data

Glatthaar, Raphael ; Schmidt, Franz-Philipp ; Hammud, Adnan ; Lunkenbein, Thomas ; Okker, Tobias ; Huster, Frank ; Seren, Sven ; Greven, Beatriz Cela ; Hahn, Giso ; Terheiden, Barbara:
Silver Metallization with Controlled Etch Stop Using SiOₓ Layers in Passivating Contacts for Improved Silicon Solar Cell Performance.
In: Solar RRL. Vol. 7 (2023) Issue 21 . - 2300491.
ISSN 2367-198X
DOI: https://doi.org/10.1002/solr.202300491

Abstract in another language

Metallization of polycrystalline-silicon/silicon oxide (poly-Si/SiOx) passivating contacts with fire-through silver paste is a crucial process for implementation of passivating contacts in industrial manufacturing of solar cells. For a microscopic understanding of the metallization process, the contact forming interface between the Ag crystallites and the poly-Si layer is investigated with high-resolution transmission electron microscopy. For this purpose, multilayer atmospheric pressure chemical vapor deposition poly-Si samples with a SiOx layer between the individual poly-Si layers are fabricated, screen printed with a lead-free Ag paste, and contact fired. Electron micrographs show that in this process the etching of the paste and the subsequent Ag crystallite formation is stopped by this interface with the SiOx layer. Additionally, energy-dispersive X-Ray mapping reveals the presence of an oxide layer around the Ag crystallites. This finding differs significantly from well-investigated classical cell concepts with contact formation on diffused crystalline silicon. Moreover, an analysis of the Ag crystallite orientation in correlation to the neighboring Si crystallite orientation indicates no direct relationship. Finally, it is shown that the use of this multilayer approach is favorable for integration into a solar cell concept leading to a higher passivation quality at the metallized area and lower contact resistivity.

Further data

Item Type: Article in a journal
Refereed: Yes
Additional notes: WOS:001066049600001
Institutions of the University: Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Operando-Analytics of Electrochemical Energy Storage > Chair Operando-Analytics of Electrochemical Energy Storage - Univ.-Prof. Dr. Thomas Lunkenbein
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Operando-Analytics of Electrochemical Energy Storage
Result of work at the UBT: No
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 13 Jun 2025 07:14
Last Modified: 04 Jul 2025 11:31
URI: https://eref.uni-bayreuth.de/id/eprint/93668