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Tap, Roland ; Willert-Porada, Monika:
Dual PE-CVD Circulating Fluidized Bed Reactor.
In: IEEE Transactions on Plasma Science. Vol. 32 (2004) Issue 5 . - pp. 2085-2092.
ISSN 0093-3813
DOI: https://doi.org/10.1109/TPS.2004.835969

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