Zeitschrift: Journal of Vacuum Science & Technology A

2021

Dill, Pauline ; Pachel, Florian ; Militzer, Christian ; Held, Alexander ; Puchas, Georg ; Knohl, Stefan ; Krenkel, Walter ; Tegenkamp, Christoph ; Goedel, Werner A.:
Atomic layer deposition onto fabrics of carbon and silicon carbide fibers : Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate.
In: Journal of Vacuum Science & Technology A. Bd. 39 (2021) Heft 5 . - 052406.
ISSN 1520-8559
DOI: https://doi.org/10.1116/6.0001193

2017

Militzer, Christian ; Knohl, Stefan ; Dzhagan, Volodymyr ; Zahn, Dietrich R. T. ; Goedel, Werner A.:
Deposition of an organic-inorganic hybrid material onto carbon fibers via the introduction of furfuryl alcohol into the atomic layer depostion process of titania and subsequent pyrolysis.
In: Journal of Vacuum Science & Technology A. Bd. 35 (2017) Heft 1 . - 01B107.
ISSN 1520-8559
DOI: https://doi.org/10.1116/1.4965699

2015

Vierneusel, Bernd ; Tremmel, Stephan ; Wartzack, Sandro:
Monte Carlo simulation of the MoS₂ sputtering process and the influence of the normalized momentum on residual stresses.
In: Journal of Vacuum Science & Technology A. Bd. 33 (2015) Heft 6 . - 061501.
ISSN 1520-8559
DOI: https://doi.org/10.1116/1.4926383