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Dual PE-CVD Circulating Fluidized Bed Reactor

Title data

Tap, Roland ; Willert-Porada, Monika:
Dual PE-CVD Circulating Fluidized Bed Reactor.
In: IEEE Transactions on Plasma Science. Vol. 32 (2004) Issue 5 . - pp. 2085-2092.
ISSN 0093-3813
DOI: https://doi.org/10.1109/TPS.2004.835969

Official URL: Volltext

Abstract in another language

Fluidized bed reactors (FBR) are widely used in chemical engineering, as well as for raw materials processing because of the excellent heat and mass transfer in a fluidized bed. A new FBR was developed for plasma assisted synthesis and coating of granular solid materials by integration of the FBR simultaneously into two different microwave cavities: a microwave plasma cavity and a chemical vapor deposition (CVD) cavity, where microwave radiation is used to heat the granular material. With such a FBR, a systematic study of plasma activation of the granular material on the chemical reaction taking place at the surface of the granular material is possible. The interaction of the fluidized particles with the microwave field influences the ignition, as well as the stability of the microwave plasma significantly. As compared to a single stage CVD-FBR or a single stage plasma enhanced (PE-FBR) coating performance and process control is significantly improved by the newly developed dual-zone circulating PE-CVD-FBR.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Ehemalige Professoren > Chair Materials Processing - Univ.-Prof. Dr. Monika Willert-Porada
Research Institutions > Research Units > ZET - Zentrum für Energietechnik
Faculties
Faculties > Faculty of Engineering Science > Chair Materials Processing
Research Institutions
Research Institutions > Research Units
Faculties > Faculty of Engineering Science > Ehemalige Professoren
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 500 Natural sciences
600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 04 May 2015 13:15
Last Modified: 04 May 2015 13:15
URI: https://eref.uni-bayreuth.de/id/eprint/11511