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Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen

Title data

Pecher, Peter:
Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen.
1997 . - II, 112 S.
( Doctoral thesis, 1998 , Universität Bayreuth, Fakultät für Mathematik, Physik und Informatik)

Further data

Item Type: Doctoral thesis
Keywords: ECR-Beschichten; Methan; Plasmatechnik
Institutions of the University: Faculties > Faculty of Mathematics, Physics und Computer Science
Faculties > Faculty of Mathematics, Physics und Computer Science > Department of Physics
Faculties > Faculty of Mathematics, Physics und Computer Science > Department of Physics > Former Professors
Faculties
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 530 Physics
Date Deposited: 24 Feb 2016 08:22
Last Modified: 24 Feb 2016 08:22
URI: https://eref.uni-bayreuth.de/id/eprint/26788