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Influence of the substrate on the overall sensor impedance of planar H₂ sensors involving TiO₂-SnO₂ interfaces

Title data

Ebersberger, Lucas ; Fischerauer, Gerhard:
Influence of the substrate on the overall sensor impedance of planar H₂ sensors involving TiO₂-SnO₂ interfaces.
In: Journal of Sensors and Sensor Systems. Vol. 4 (August 2015) Issue 1 . - pp. 85-90.
ISSN 2194-878X
DOI: https://doi.org/10.5194/jsss-4-85-2015

Official URL: Volltext

Project information

Project financing: Bundesministerium für Bildung und Forschung

Abstract in another language

To date, very little has been written about the influence of the substrate layer on the overall sensor impedance of single- and multilayer planar sensors (e. g., metal-oxide sensors). However, the substrate is an elementary part of the sensor element. Through the selection of a substrate, the sensor performance can be manipulated. The current contribution reports on the substrate influence in multi-layer metal-oxide chemical sensors. Measurements of the impedance are used to discuss the sensor performance with quartz substrates, (laboratory) glass substrates and substrates covered by silicon dioxide insulating layers. Numerical experiments based on previous measurement results show that inexpensive glass substrates contribute up to 97 % to the overall sensor responses. With an isolating layer of 200 nm SiO₂, the glass substrate contribution is reduced to about 25 %.

Further data

Item Type: Article in a journal
Refereed: Yes
Keywords: Planar gas sensors;, metal oxides; interdigital electrodes; impedance spectroscopy; substrate influence
Institutions of the University: Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Profile Fields > Emerging Fields > Energy Research and Energy Technology
Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Profile Fields
Profile Fields > Emerging Fields
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 16 Feb 2016 08:00
Last Modified: 10 Mar 2016 09:08
URI: https://eref.uni-bayreuth.de/id/eprint/30823