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Materials issues of SAW sensors for high-temperature applications


Mrosk, Joachim ; Berger, Lothar ; Ettl, Christoph ; Fecht, Hans-Jörg ; Fischerauer, Gerhard ; Dommann, Alex:
Materials issues of SAW sensors for high-temperature applications.
In: IEEE Transactions on Industrial Electronics. Bd. 48 (April 2001) Heft 2 . - S. 258-264.
ISSN 0278-0046
DOI: https://doi.org/10.1109/41.915403


The technology of surface acoustic wave (SAW) devices allows the integration of signal processing and sensor functions within one product. In the past, SAW sensors have been operated at room temperature or 100 °C – 200 °C at most. Material-related problems become obvious if one attempts to increase this operating temperature to a value as high as 1000 °C. First experimental results will be presented based on a variation of the metallization and the use of diffusion barriers. It is expected that the use of these specially tailored materials with particular functional properties will lead to a considerable improvement of the lifetime and reliability of SAW sensors and the development of devices resistant to high temperatures as well as high pressures and chemically aggressive environments. The high-temperature characteristics of such novel devices are investigated by finite-element simulation and by experimental deformation analysis. It will also be discussed which assembly, interconnection, and packaging techniques are applicable at 1000 °C.

Weitere Angaben

Publikationsform: Artikel in einer Zeitschrift
Begutachteter Beitrag: Ja
Keywords: Amorphous materials; amorphous metallic layers; diffusion barriers; electromigration; high-temperature electronics; metallization; surface acoustic waves
Institutionen der Universität: Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 22 Feb 2016 07:22
Letzte Änderung: 22 Feb 2016 07:22
URI: https://eref.uni-bayreuth.de/id/eprint/31097