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Substrate influence on the characteristics of interdigital-electrode gas sensors

Title data

Fischerauer, Alice ; Schwarzmüller, Christian ; Fischerauer, Gerhard:
Substrate influence on the characteristics of interdigital-electrode gas sensors.
In: Proceedings of the Sixth International Multi-Conference on Systems, Signals & Devices : SSD’09. - Piscataway, NJ : Institute of Electrical and Electronics Engineers (IEEE) , 2009 . - 5 S.
ISBN 978-1-4244-4346-8
DOI: https://doi.org/10.1109/SSD.2009.4956738

Abstract in another language

It is well known that miniaturized gas sensors can be obtained by coating a planar interdigital capacitor with a sensitive layer and exploiting the impedance changes induced by analyte incorporation. Commonly, one assumes that the sensor characteristics only depend on the sensitive layer but not on the substrate carrying the interdigital capacitor. However, in many cases, the sensor has to be exposed to higher temperatures. This is true, for instance, when hot exhaust gases are to be monitored or when the functional principle of the sensitive layer requires heating. A case in point are hydrocarbon sensors based on a zeolite layer in contact with a semiconducting metal-oxide such as Cr2O3. At operating temperatures of several hundred degrees centigrade, the substrate does influence the sensor impedance in a manner that can no longer be neglected. This contribution reports on the model-based interpretation of experimental results which allows one to draw conclusions on this substrate influence. The experiments were carried out with Si, glass, and quartz substrates at 300 °C and in various atmospheres. The current results bear relevance for the design and understanding of all planar interdigital-electrode sensors evaluated by impedance spectroscopy.

Further data

Item Type: Article in a book
Refereed: No
Institutions of the University: Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 13 Jun 2016 08:43
Last Modified: 13 Jun 2016 08:43
URI: https://eref.uni-bayreuth.de/id/eprint/32664