Atomic layer deposition onto fabrics of carbon and silicon carbide fibers : Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate

Titelangaben

Dill, Pauline ; Pachel, Florian ; Militzer, Christian ; Held, Alexander ; Puchas, Georg ; Knohl, Stefan ; Krenkel, Walter ; Tegenkamp, Christoph ; Goedel, Werner A.:
Atomic layer deposition onto fabrics of carbon and silicon carbide fibers : Preparation of multilayers comprising alumina, titania-furfuryl alcohol hybrid, and titanium phosphate.
In: Journal of Vacuum Science & Technology A. Bd. 39 (2021) Heft 5 . - 052406.
ISSN 1520-8559
DOI: https://doi.org/10.1116/6.0001193

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