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Microacoustic devices as chemical sensors

Title data

Fischerauer, Gerhard:
Microacoustic devices as chemical sensors.
Event: 2010 IEEE International Ultrasonics Symposium , 11.-14.10.2010 , San Diego, California, USA.
(Conference item: Conference , Speech )

Abstract in another language

Microacoustic chemical sensors based, for instance, on quartz crystal microbalances (QCM) or surface acoustic wave (SAW) devices have been popular in laboratories around the world for almost 30 years. They have also met with some commercial success, and one of the underlying effects, viz., mass loading, is routinely used in thin-film technology to monitor film growth during deposition. This shourt course aims at introducing the principles of such sensors and typical issues likely to crop up during their application. The focus is on physical and functional aspects with an emphasis on transduction mechanisms and terminal characteristics. For this reason, the course might also appeal to those interested in micro-acoustic sensors in general.

Further data

Item Type: Conference item (Speech)
Refereed: No
Institutions of the University: Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 12 Nov 2021 08:46
Last Modified: 12 Nov 2021 08:46
URI: https://eref.uni-bayreuth.de/id/eprint/67764