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Mrosk, Joachim ; Ettl, Christoph ; Berger, Lothar ; Dabala, P. ; Fecht, Hans-Jörg ; Fischerauer, Gerhard ; Hornsteiner, Jörg ; Riek, Klaus ; Riha, Evelyn ; Born, Eberhard ; Werner, M. ; Dommann, Alex ; Auersperg, Jürgen ; Kieselstein, Eva ; Michel, Bernd ; Mucha, Andreas:
SAW sensors for high-temperature applications.
In:
IECON '98 : Proceedings of the 24th Annual Conference of the IEEE Industrial Electronics Society. Volume 4. -
Piscataway, NJ
: IEEE
,
1998
. - S. 2386-2390
ISBN 0-7803-4503-7
DOI: https://doi.org/10.1109/IECON.1998.724098
Abstract
The technology of surface acoustic wave (SAW) devices allows the integration of signal processing and sensor functions within one product. In the past, SAW sensors have been operated at room temperature or 100 to 200 °C at most. Materials related problems become obvious if one attempts to increase this operating temperature to a value as high as 1000 °C. First experimental results are presented based on a variation of the metallization and the use of diffusion barriers. It is expected that the use of these specially tailored materials with particular functional properties will lead to a considerable improvement of the lifetime and reliability of SAW sensors and the development of devices resistant to high temperatures as well as high pressures and chemically aggressive environments. The high-temperature characteristics of such novel devices are investigated by finite element simulation and by experimental deformation analyses. It is also discussed which assembly, interconnection and packaging techniques are applicable at 1000 °C.
Weitere Angaben
| Publikationsform: | Aufsatz in einem Buch |
|---|---|
| Begutachteter Beitrag: | Nein |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer |
| Titel an der UBT entstanden: | Nein |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 22 Jul 2024 12:36 |
| Letzte Änderung: | 22 Jul 2024 12:38 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/90013 |