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Fischerauer, Gerhard:
On measuring the temperature coefficient of resistivity and the thermal expansion coefficient of conductive thin films.
In: Thin Solid Films.
Bd. 825
(2025)
.
- 140727.
ISSN 0040-6090
DOI: https://doi.org/10.1016/j.tsf.2025.140727
Abstract
We analyze the details of extracting the temperature coefficient of resistivity and the thermal expansion coefficient of thin-film materials from the measured temperature coefficient of resistance of thin-film resistors on supporting substrates. It is shown that this requires two straining experiments, one thermal experiment, and the ability to deposit identical films on two different substrates with known properties. An analysis of experimental data from the literature, which includes the application of accepted rules from the Guide to the Expression of Uncertainty in Measurement (GUM), reveals that the violation of the stated requirements usually leads to inconsistent or arbitrary results.
Weitere Angaben
| Publikationsform: | Artikel in einer Zeitschrift |
|---|---|
| Begutachteter Beitrag: | Ja |
| Keywords: | Thin films; temperature coefficient of resistivity; thermal expansion coefficient; electrical measurement; distinguishability |
| Institutionen der Universität: | Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 600 Technik 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 09 Jul 2025 11:59 |
| Letzte Änderung: | 09 Jul 2025 11:59 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/93960 |