at Google ScholarTitle data
Gollwitzer, Andreas ; Fischerauer, Gerhard:
A Novel Method for the Visualization of Vibrations in Surface Acoustic Wave Devices.
In:
Proceedings Sensor Conference 2007 : 13th international conference. Volume 2. -
Wunstorf
: AMA Service
,
2007
. - pp. 81-86
ISBN 978-3-9810993-2-4
Abstract in another language
We have realized a setup capable of measuring the amplitude and phase of vibrations in surface acoustic wave (SAW) devices. It consists of a modified Michelson interferometer and a vector network analyzer (VNA). This combination and additional signal processing make it possible to detect the complex amplitude of a harmonic displacement on the surface of a SAW device. We discuss this technique and explain our setup with an upper frequency limit in the gigahertz range, a minimum detectable displacement amplitude of 50 pm and a lateral resolution of about 500 nm. We demonstrate our setup by showing 2D pictures of the complex amplitude of a SAW propagating over an interdigital transducer (IDT) region and comparing the results with a calculation of the phase of the SAW in this area. We also show, how to obtain the piezoelectric coupling coefficient of the Rayleigh wave in the observed material.
Further data
| Item Type: | Article in a book |
|---|---|
| Refereed: | No |
| Institutions of the University: | Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer Faculties Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 12 Nov 2021 12:49 |
| Last Modified: | 12 Nov 2021 12:49 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/67783 |