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Impact of field cycling on HfO₂ based non-volatile memory devices

Title data

Schroeder, U. ; Pešic, M. ; Schenk, T. ; Mulaosmanovic, H. ; Slesazeck, S. ; Ocker, J. ; Richter, C. ; Yurchuk, E. ; Khullar, K. ; Müller, J. ; Polakowski, P. ; Grimley, E. D. ; LeBeau, J. M. ; Flachowsky, S. ; Jansen, S. ; Kolodinski, S. ; van Bentum, R. ; Kersch, A. ; Künneth, Christopher ; Mikolajick, T.:
Impact of field cycling on HfO₂ based non-volatile memory devices.
In: 2016 46th European Solid-State Device Research Conference (ESSDERC). - Lausanne , 2016 . - pp. 364-368
ISBN 978-1-5090-2969-3
DOI: https://doi.org/10.1109/ESSDERC.2016.7599662

Abstract in another language

The discovery of ferroelectricity in HfO 2 and ZrO 2 based dielectrics enabled the introduction of these materials in highly scalable non-volatile memory devices. Typical memory cells are using a capacitor or a transistor as the storage device. These scaled devices are sensitive to the local structure of the storage material, here the granularity of the dielectric doped HfO 2 layer, varying the local ferroelectric properties. Detailed studies are conducted to correlate these structural properties to the electrical performance to further optimize the devices for future applications.

Further data

Item Type: Article in a book
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science > Juniorprofessur Computational Materials Science > Juniorprofessur Computational Materials Science - Juniorprof. Dr. Christopher Künneth
Result of work at the UBT: No
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 05 May 2023 08:51
Last Modified: 05 May 2023 08:51
URI: https://eref.uni-bayreuth.de/id/eprint/76158