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Method and device for in situ process monitoring

Title data

Herink, Georg:
Method and device for in situ process monitoring.
US20210396508A1 (2019)

Further data

Item Type: Patent
Patent Applicant: Georg Herink
Date of the patent's registration: 2019
Institutions of the University: Faculties > Faculty of Mathematics, Physics und Computer Science > Department of Physics > Juniorprofessor Experimental Physics VIII - Ultrafast Dynamics > Juniorprofessor Experimental Physics VIII - Ultrafast Dynamics - Juniorprof. Dr. Georg Herink
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 530 Physics
Date Deposited: 05 Jul 2023 07:37
Last Modified: 05 Jul 2023 07:37
URI: https://eref.uni-bayreuth.de/id/eprint/85963