at Google ScholarTitle data
Herink, Georg:
Method and device for in situ process monitoring.
US20210396508A1 (2019)
Further data
| Item Type: | Patent |
|---|---|
| Patent Applicant: | Georg Herink |
| Date of the patent's registration: | 2019 |
| Institutions of the University: | Faculties > Faculty of Mathematics, Physics und Computer Science > Department of Physics > Juniorprofessor Experimental Physics VIII - Ultrafast Dynamics > Juniorprofessor Experimental Physics VIII - Ultrafast Dynamics - Juniorprof. Dr. Georg Herink |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 500 Science > 530 Physics |
| Date Deposited: | 05 Jul 2023 07:37 |
| Last Modified: | 05 Jul 2023 07:37 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/85963 |