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All-dry processible and PAG-attached molecular glasses for improved lithographic performance

Title data

Krysak, Marie ; Kolb, Tristan ; Neuber, Christian ; Schmidt, Hans-Werner ; Ober, Christopher K.:
All-dry processible and PAG-attached molecular glasses for improved lithographic performance.
In: Proceedings of SPIE. Vol. 7639 (2010) . - 76392C.
ISSN 0277-786X
DOI: https://doi.org/10.1117/12.848385

Project information

Project financing: Bayerisches Staatsministerium für Wissenschaft, Forschung und Kunst

Abstract in another language

As the semiconductor industry moves forward, resoln. limits are being pushed to the sub-30 nm regime. In order to meet these demands, radical new resist design and processes must be explored. We have developed a mol. glass system for all-dry processing conditions. Phys. vapor deposition (PVD) has been used for film formation onto silicon wafers. PVD deposits a uniform film of controlled thickness free from impurities that are often introduced by casting solvents used in traditional spin coating methods. Thermal development is used as an alternative to processing in solvents in order to prevent resist swelling and pattern collapse by capillary forces. The deposited mol. is designed to crosslink upon E-beam irradn. without additives, and therefore form a homogeneous, single component film. PAG-attached mol. glasses have been synthesized in order to promote film homogeneity as well. By tethering PAG directly to the mol. glass core, issues such as PAG aggregation can be remedied. Acid migration, which increases blur and LER, can also be hindered.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions
Research Institutions > Research Centres
Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF
Graduate Schools
Graduate Schools > Elite Network Bavaria
Graduate Schools > Elite Network Bavaria > Macromolecular Science
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 26 Jun 2015 08:52
Last Modified: 26 Jun 2015 08:52
URI: https://eref.uni-bayreuth.de/id/eprint/1255