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Towards environmentally friendly, dry deposited, water developable molecular glass photoresists

Title data

Pfeiffer, Frauke ; Felix, Nelson M. ; Neuber, Christian ; Ober, Christopher K. ; Schmidt, Hans-Werner:
Towards environmentally friendly, dry deposited, water developable molecular glass photoresists.
In: Physical Chemistry Chemical Physics. Vol. 10 (2008) Issue 9 . - pp. 1257-1262.
ISSN 1463-9084
DOI: https://doi.org/10.1039/b715819j

Official URL: Volltext

Project information

Project financing: Alexander von Humboldt-Stiftung

Abstract in another language

Photoresists based on molecular glasses are gaining more and more importance as resist material
to replace polymer based photoresist. In addition environmental issues have to be considered in
the long-term. Therefore the paper describes novel negative photoresists containing a ternary
mixture of a glassy low molecular functional polyphenol where the film preparation is possible by
solvent-free physical vapor deposition. After UV light exposure and a thermal annealing process
to enable acid catalyzed crosslinking between the molecular glass and the crosslinker, the
photoresist was developed using only water to give well-defined patterns. In order to
experimentally study efficiently the multiple parameters such as composition, exposure dose, and
development times combinatorial PVD techniques were utilized.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions
Research Institutions > Research Centres
Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF
Research Institutions > Research Centres > Bayreuth Center for Colloids and Interfaces - BZKG
Research Institutions > Collaborative Research Centers, Research Unit
Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 26 Jun 2015 08:21
Last Modified: 26 Jun 2015 08:21
URI: https://eref.uni-bayreuth.de/id/eprint/1304