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All-dry photoresist systems : Physical vapor depositions of molecular glasses

Title data

Pfeiffer, Frauke ; Neuber, Christian ; Schmidt, Hans-Werner:
All-dry photoresist systems : Physical vapor depositions of molecular glasses.
In: Advances in Resist Materials and Processing Technology XXV : 25 - 27 February 2008, San Jose, California, USA. - Bellingham, Wash. : SPIE , 2008 . - 69231F/1-69231F/8 . - (Proceedings / SPIE, International Society for Optical Engineering ; 6923 )
ISBN 978-0-8194-7108-6
DOI: https://doi.org/10.1117/12.771101

Project information

Project financing: Deutsche Forschungsgemeinschaft

Abstract in another language

The aim of the paper is the development of an all-dry photolithographic process in which the film preparation step as well as the development step is performed without the use of solvent. To implement an all-dry photoresist system we focused on coumarin derivatives, as this class can be photodimerized in the solid state and features sufficient high thermal stability. The dimerized product exhibits sufficiently different physical properties. The monomer can be evaporated at elevated temperatures whereas the dimerized product remains non-volatile under these conditions. With a tailored glass forming coumarin derivative we demonstrated the capability to develop clear patterns. A combinatorial approach, i.e. producing a compositional library in combination with the variation of exposure dose was utilized to efficiently optimize the all-dry photoresist system.

Further data

Item Type: Article in a book
Refereed: Yes
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions
Research Institutions > Research Centres
Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF
Research Institutions > Research Centres > Bayreuth Center for Colloids and Interfaces - BZKG
Research Institutions > Collaborative Research Centers, Research Unit
Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 26 Jun 2015 08:32
Last Modified: 16 Sep 2016 06:42
URI: https://eref.uni-bayreuth.de/id/eprint/1305