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Multikaskadenregelung von Verdampfungsquellen

Title data

Zeuke, Christoph:
Multikaskadenregelung von Verdampfungsquellen.
Aachen : Shaker , 2015 . - XVIII, 141 p. - (Bayreuther Beiträge zur Sensorik und Messtechnik ; 12 )
ISBN 978-3-8440-3336-6
( Doctoral thesis, 2014 , Universität Bayreuth, Fakultät für Ingenieurwissenschaften)

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Item Type: Doctoral thesis
Keywords: Dünne Schicht; Expertensystem; Hierarchische Regelung; Kaskadenregelung; OLED; Prozessregelung; PVD-Verfahren; Schichtwachstum; Zeitvariantes Regelungssystem
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Faculties
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 24 Feb 2016 14:03
Last Modified: 24 Feb 2016 14:03
URI: https://eref.uni-bayreuth.de/id/eprint/30209