on the publication serverTitle data
Zeuke, Christoph:
Multikaskadenregelung von Verdampfungsquellen.
Aachen
:
Shaker
,
2015
. - XVIII, 141 p.
- (Bayreuther Beiträge zur Sensorik und Messtechnik
; 12
)
ISBN 978-3-8440-3336-6
(
Doctoral thesis,
2014
, Universität Bayreuth, Fakultät für Ingenieurwissenschaften)
Related URLs
Further data
| Item Type: | Doctoral thesis |
|---|---|
| Keywords: | Dünne Schicht; Expertensystem; Hierarchische Regelung; Kaskadenregelung; OLED; Prozessregelung; PVD-Verfahren; Schichtwachstum; Zeitvariantes Regelungssystem |
| Institutions of the University: | Faculties > Faculty of Engineering Science Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer Faculties |
| Result of work at the UBT: | Yes |
| DDC Subjects: | 600 Technology, medicine, applied sciences > 620 Engineering |
| Date Deposited: | 24 Feb 2016 14:03 |
| Last Modified: | 24 Feb 2016 14:03 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/30209 |
