Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation

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Lorenzoni, Matteo ; Wagner, Daniel ; Neuber, Christian ; Schmidt, Hans-Werner ; Perez-Murano, Francesc:
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation.
In: Applied Surface Science. Bd. 442 (2018) . - S. 106-113.
ISSN 1873-5584
DOI: https://doi.org/10.1016/j.apsusc.2018.02.096

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