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Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation

Title data

Lorenzoni, Matteo ; Wagner, Daniel ; Neuber, Christian ; Schmidt, Hans-Werner ; Perez-Murano, Francesc:
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation.
In: Applied Surface Science. Vol. 442 (June 2018) . - 106 - 113.
ISSN 1873-5584
DOI: https://doi.org/10.1016/j.apsusc.2018.02.096

Official URL: Volltext

Project information

Project financing: SNM Project - Single Nanometer Manufacturing for beyond CMOS devices

Further data

Item Type: Article in a journal
Refereed: Yes
Keywords: Molecular glass resist; Scanning probe lithography; Tip based oxidation
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Colloids and Interfaces - BZKG
Research Institutions > Affiliated Institutes > Bavarian Polymer Institute (BPI)
Research Institutions
Research Institutions > Research Centres
Research Institutions > Affiliated Institutes
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 21 Mar 2018 08:15
Last Modified: 26 Mar 2018 12:11
URI: https://eref.uni-bayreuth.de/id/eprint/43059