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The properties of guided bulk acoustic wave structures with ZnO piezolayers embedded in silicon

Title data

Konopka, Jaroslaw ; Rösler, Ulrike ; Ruile, Werner ; Fischerauer, Gerhard:
The properties of guided bulk acoustic wave structures with ZnO piezolayers embedded in silicon.
In: Institute of Electrical and Electronics Engineers (ed.): Fourth International Multi-Conference on Systems, Signals & Devices : summary proceedings. Volume 4. Conference on Sensors, Circuits & Instrumentation Systems. - Hammamet, Tunisia , 2007 . - 8 S.
ISBN 978-9973-959-06-5

Abstract in another language

Higher frequency, better reliability, robustness, further
miniaturization, unification and simplification of the fabrication process and integration with Si-based electronics became the most important requirements for further development of SAW technology. In order to fulfill these requirements a new type of structure has been proposed and analyzed: a guided acoustic wave is propagating in the bulk of a multi-layer system. The Guided Bulk/Boundary Acoustic Wave (GBAW) structures considered consist of a ZnO piezolayer, different types of metal electrodes and additional layers (e.g. SiO2, metal seed layer) sandwiched between two silicon substrates. As the wave is completely isolated from the outside world, there is no need to
encase the structure obtained, significantly reducing the final dimensions of the device, additionally simplifying the fabrication process with the possibility of the integration with Si-based electronics. The properties of a variety of GBAW structures have been theoretically investigated. Characteristics such as velocity, coupling factor, reflection coefficient and TCF have been evaluated, compared and discussed. It was found that the properties of the GBAW structures strongly depend on the metals used as electrodes, the choice of materials as well as combination and thicknesses of the layers. An optimized GBAW structure might be a very attractive and high potential alternative to standard SAW technology.

Further data

Item Type: Article in a book
Refereed: No
Institutions of the University: Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology > Chair Measurement and Control Technology - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer
Faculties
Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Measurement and Control Technology
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 12 Nov 2021 14:06
Last Modified: 12 Nov 2021 14:06
URI: https://eref.uni-bayreuth.de/id/eprint/67784