bei Google ScholarTitelangaben
Konopka, Jaroslaw ; Rösler, Ulrike ; Ruile, Werner ; Fischerauer, Gerhard:
The properties of guided bulk acoustic wave structures with ZnO piezolayers embedded in silicon.
In:
Institute of Electrical and Electronics Engineers
(Hrsg.):
Fourth International Multi-Conference on Systems, Signals & Devices : summary proceedings. Volume 4. Conference on Sensors, Circuits & Instrumentation Systems. -
Hammamet, Tunisia
,
2007
. - 8 S.
ISBN 978-9973-959-06-5
Abstract
Higher frequency, better reliability, robustness, further
miniaturization, unification and simplification of the fabrication process and integration with Si-based electronics became the most important requirements for further development of SAW technology. In order to fulfill these requirements a new type of structure has been proposed and analyzed: a guided acoustic wave is propagating in the bulk of a multi-layer system. The Guided Bulk/Boundary Acoustic Wave (GBAW) structures considered consist of a ZnO piezolayer, different types of metal electrodes and additional layers (e.g. SiO2, metal seed layer) sandwiched between two silicon substrates. As the wave is completely isolated from the outside world, there is no need to
encase the structure obtained, significantly reducing the final dimensions of the device, additionally simplifying the fabrication process with the possibility of the integration with Si-based electronics. The properties of a variety of GBAW structures have been theoretically investigated. Characteristics such as velocity, coupling factor, reflection coefficient and TCF have been evaluated, compared and discussed. It was found that the properties of the GBAW structures strongly depend on the metals used as electrodes, the choice of materials as well as combination and thicknesses of the layers. An optimized GBAW structure might be a very attractive and high potential alternative to standard SAW technology.
Weitere Angaben
| Publikationsform: | Aufsatz in einem Buch |
|---|---|
| Begutachteter Beitrag: | Nein |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 12 Nov 2021 14:06 |
| Letzte Änderung: | 12 Nov 2021 14:06 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/67784 |