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Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists

Title data

Wieberger, Florian ; Neuber, Christian ; Ober, Christopher K. ; Schmidt, Hans-Werner:
Tailored Star Block Copolymer Architecture for High Performance Chemically Amplified Resists.
In: Advanced Materials. Vol. 24 (2012) Issue 44 . - pp. 5939-5944.
ISSN 1521-4095
DOI: https://doi.org/10.1002/adma.201201547

Project information

Project financing: Deutsche Forschungsgemeinschaft

Abstract in another language

Star block copolymers are demonstrated for their application as a high-performance resist material. This new resist material shows advanced progress in sensitivity and solubility contrast and is finally combinatorially optimized to achieve a 66 nm line/space pattern. The tailored molecular architecture of the star block copolymer is synthesized via core-first atom transfer radical polymerization (ATRP) and shows narrow polydispersity indices below 1.2.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions
Research Institutions > Research Centres
Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF
Research Institutions > Research Centres > Bayreuth Center for Colloids and Interfaces - BZKG
Research Institutions > Collaborative Research Centers, Research Unit
Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 29 Jun 2015 09:27
Last Modified: 29 Jun 2015 09:27
URI: https://eref.uni-bayreuth.de/id/eprint/1202