ERef Bayreuth

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Combinatorial Optimization of a Molecular Glass Photo Resist System for Electron Beam Lithography

Title data

Bauer, Wolfgang-Andreas ; Neuber, Christian ; Ober, Christopher K. ; Schmidt, Hans-Werner:
Combinatorial Optimization of a Molecular Glass Photo Resist System for Electron Beam Lithography.
In: Advanced Materials. Vol. 23 (2011) Issue 45 . - pp. 5404-5408.
ISSN 1521-4095
DOI: https://doi.org/10.1002/adma.201103107

Project information

Project financing:	Deutsche Forschungsgemeinschaft Bayerisches Staatsministerium für Wissenschaft, Forschung und Kunst

Abstract in another language

Electron beam lithography is a powerful technique for the productionof nanostructures but pattern quality depends on numerous interacting process variables. Orthogonal gradients of resist composition, baking temperatures, and development time as well as dose variations inside writing fields are used to prepare ternary combinatorial libraries for an efficient stepwise optimization of a molecular glass negative tone resist system.

Further data

Item Type:	Article in a journal
Refereed:	Yes
Institutions of the University:	Faculties Faculties > Faculty of Biology, Chemistry and Earth Sciences Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt Profile Fields Profile Fields > Advanced Fields Profile Fields > Advanced Fields > Polymer and Colloid Science Profile Fields > Advanced Fields > Advanced Materials Research Institutions Research Institutions > Research Centres Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF Research Institutions > Research Centres > Bayreuth Center for Colloids and Interfaces - BZKG Research Institutions > Collaborative Research Centers, Research Unit Research Institutions > Collaborative Research Centers, Research Unit > SFB 481 Komplexe Makromolekül- und Hybridsysteme in inneren und äußeren Feldern Graduate Schools Graduate Schools > Elite Network Bavaria Graduate Schools > Elite Network Bavaria > Macromolecular Science
Result of work at the UBT:	Yes
DDC Subjects:	500 Science > 540 Chemistry
Date Deposited:	29 Jun 2015 10:08
Last Modified:	29 Jun 2015 10:08
URI:	https://eref.uni-bayreuth.de/id/eprint/1209