ERef Bayreuth

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Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation

Title data

Lorenzoni, Matteo ; Wagner, Daniel ; Neuber, Christian ; Schmidt, Hans-Werner ; Perez-Murano, Francesc:
Sub-30 nm patterning of molecular resists based on crosslinking through tip based oxidation.
In: Applied Surface Science. Vol. 442 (2018) . - pp. 106-113.
ISSN 1873-5584
DOI: https://doi.org/10.1016/j.apsusc.2018.02.096

Official URL:

Project information

Project financing:	SNM Project - Single Nanometer Manufacturing for beyond CMOS devices

Further data

Item Type:	Article in a journal
Refereed:	Yes
Keywords:	Molecular glass resist; Scanning probe lithography; Tip based oxidation
Institutions of the University:	Faculties Faculties > Faculty of Biology, Chemistry and Earth Sciences Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt Profile Fields Profile Fields > Advanced Fields Profile Fields > Advanced Fields > Polymer and Colloid Science Profile Fields > Advanced Fields > Advanced Materials Research Institutions > Central research institutes > Bayreuth Center for Colloids and Interfaces - BZKG Research Institutions > Affiliated Institutes > Bavarian Polymer Institute (BPI) Research Institutions Research Institutions > Central research institutes Research Institutions > Affiliated Institutes
Result of work at the UBT:	Yes
DDC Subjects:	500 Science > 540 Chemistry
Date Deposited:	21 Mar 2018 08:15
Last Modified:	07 Nov 2023 10:50
URI:	https://eref.uni-bayreuth.de/id/eprint/43059