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Hornsteiner, Jörg ; Born, Eberhard ; Fischerauer, Gerhard ; Riha, Evelyn:
Surface acoustic wave sensors for high-temperature applications.
In:
Proceedings of the 1998 IEEE International Frequency Control Symposium. -
Piscataway, NJ
: IEEE
,
1998
. - S. 615-620
ISBN 0-7803-4373-5
DOI: https://doi.org/10.1109/FREQ.1998.717964
Abstract
Results of investigations of surface acoustic wave (SAW) devices working at high temperatures are presented in this paper. The considered substrate materials are lithium niobate (LiNbO3), quartz and langasite (La3Ga5SiO14). In addition, electrode materials and assembly, interconnect and packaging strategies are discussed or examined. Delay lines on LiNbO3 had low SAW attenuation up to approx. 550 °C. The frequency response disappeared completely at about 800 °C. Delay lines on quartz had low SAW attenuation up to 500 °C, a temperature being significantly below the phase transition from alpha- to beta-quartz at 573 °C. Delay lines on La3Ga5SiO14 withstand extreme temperatures: a SAW response was observed up to destruction of the packages used in these tests, however, resulted in a degradation of the device performance starting at about 600 °C. An identification (ID) tag on La3Ga5SiO14, could be used as a wireless passive thermometer for measuring high temperatures in industrial process control applications.
Weitere Angaben
| Publikationsform: | Aufsatz in einem Buch |
|---|---|
| Begutachteter Beitrag: | Nein |
| Keywords: | SAW devices; lithium niobate; langasite; high temperature; wireless passive thermometer |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Mess- und Regeltechnik > Lehrstuhl Mess- und Regeltechnik - Univ.-Prof. Dr.-Ing. Gerhard Fischerauer |
| Titel an der UBT entstanden: | Nein |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 22 Jul 2024 12:44 |
| Letzte Änderung: | 22 Jul 2024 12:44 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/90022 |