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Novel tube-type LTCC transducers with buried heaters and inner electrodes for high-temperatures gas sensors

Title data

Kita, Jaroslaw ; Brandenburg, Annica ; Groß, Andrea ; Moos, Ralf:
Novel tube-type LTCC transducers with buried heaters and inner electrodes for high-temperatures gas sensors.
2012
Event: 26th European Conference on Solid-State Transducers, EUROSENSOR 2012 , 09.-12.09.2012 , Cracow, Poland.
(Conference item: Conference , Other Presentation type)
DOI: https://doi.org/10.1016/j.proeng.2012.09.084

Official URL: Volltext

Abstract in another language

In this work, a fully novel setup for high temperature gas sensor applications is presented. It consists of small tubular devices manufactured in Low Temperature Co-fired Ceramics (LTCC) Technology. It provides buried heaters and temperature sensors - all integrated in the tube - and interdigitated electrodes on the inner side of the tube. The sensitive film is also located inside of the tube, featuring an excellent homogenous temperature distribution on the sensitive film. As an example for a suitable application, a tubular dosimeter-type NO sensor for low level amount detection in varying gas velocities was developed.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 15 Apr 2015 12:02
Last Modified: 14 Apr 2016 06:41
URI: https://eref.uni-bayreuth.de/id/eprint/10132