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Comparison of star and linear ArF resists

Title data

Forman, Drew C. ; Wieberger, Florian ; Gröschel, André H. ; Müller, Axel H. E. ; Schmidt, Hans-Werner ; Ober, Christopher K.:
Comparison of star and linear ArF resists.
In: Proceedings of SPIE. Vol. 7639 (2010) . - 76390P.
ISSN 0277-786X
DOI: https://doi.org/10.1117/12.848344

Abstract in another language

Linear and star-shaped ArF photoresists were prepd. and preliminary lithog. comparison was performed using electron-beam exposure. An oligo-initiator based on saccharose forms the core of the star shaped photoresist from which three std. ArF photoresist monomers, .alpha.-gamma butyrolactone methacrylate (GBLMA), Me adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) were polymd. Conditions were adjusted to obtain a low polydispersity, 6 kg/mol star polymer with a d.p. of approx. five mers per arm. For comparison, a linear photoresist control was prepd. using the same scheme. The star resist architecture was found to improve roughness without reducing sensitivity or resoln.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties
Faculties > Faculty of Biology, Chemistry and Earth Sciences
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry I > Chair Macromolecular Chemistry I - Univ.-Prof. Dr. Hans-Werner Schmidt
Faculties > Faculty of Biology, Chemistry and Earth Sciences > Department of Chemistry > Chair Macromolecular Chemistry II
Profile Fields
Profile Fields > Advanced Fields
Profile Fields > Advanced Fields > Polymer and Colloid Science
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions
Research Institutions > Research Centres
Research Institutions > Research Centres > Bayreuth Institute of Macromolecular Research - BIMF
Result of work at the UBT: Yes
DDC Subjects: 500 Science > 540 Chemistry
Date Deposited: 26 Jun 2015 08:12
Last Modified: 26 Jun 2015 08:12
URI: https://eref.uni-bayreuth.de/id/eprint/1244