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Meiss, Sebastian A. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-Conducting Probes for Low Temperature Plasmas.
2007
Veranstaltung: 6. Doktoranden-Workshop Physikalische Festkörperchemie
, 08.-09.Okt.2007
, Braunschweig, Germany.
(Veranstaltungsbeitrag: Workshop
,
Sonstige
Präsentationstyp)
Abstract
Yttria stabilized zirconia (YSZ) is a ceramic material that shows a very high ionic conductivity at elevated temperatures, with O2− being the mobile species. Since its electronic partial conductivity is negligibly small, YSZ can be used for the construction of purely ion-conducting plasma probes. The electrochemical processes taking place at the so-called triple phase boundary (TPB), where YSZ, an electron providing or accepting metal electrode and the gaseous phase containing oxygen meet, are studied well. Such processes include adsorption, dissociation and surface diffusion of oxygen species and charge transfer processes to reduce neutral oxygen to O2−. As oxygen plasmas provide and accept electrons and also dissociated and partially reduced oxygen from the gaseous phase to the YSZ|plasma interface5, the TPB is reduced to a two phase boundary at such an interface, maximizing the reactive area. Here we present the concept and design of such an ion-conducting probe, with an integrated heating system and a rectangular YSZ tip. IV-characteristics measured with single- and double-probe setups in a capacitive radio frequency discharge of various, oxygen containing gas compositions are presented. Their evaluation is compared to values obtained with traditional, purely electron conducting probes.
Weitere Angaben
| Publikationsform: | Veranstaltungsbeitrag (Sonstige) |
|---|---|
| Begutachteter Beitrag: | Ja |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien Profilfelder > Advanced Fields > Neue Materialien Forschungseinrichtungen > Zentrale wissenschaftliche Einrichtungen > Bayreuther Materialzentrum - BayMAT Profilfelder Profilfelder > Advanced Fields Forschungseinrichtungen Forschungseinrichtungen > Zentrale wissenschaftliche Einrichtungen |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 08 Jun 2015 06:49 |
| Letzte Änderung: | 18 Apr 2018 02:48 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/14836 |