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Ion-Conducting Probes for Low Temperature Plasmas

Titelangaben

Meiss, Sebastian A. ; Rohnke, Marcus ; Rettig, Frank ; Moos, Ralf ; Janek, Jürgen:
Ion-Conducting Probes for Low Temperature Plasmas.
2007
Veranstaltung: 7th International Workshop on Electrical Probes in Magnetized Plasmas , 22.-25.07.2007 , Prague, Czech Republic.
(Veranstaltungsbeitrag: Workshop , Sonstige Präsentationstyp)

Abstract

Yttria stabilized zirconia (YSZ) is a ceramic material with a melting point of ca. 3000 K. It shows a very high ionic conductivity at elevated temperatures, with twice negatively charged oxygen ions being the mobile species. Since its electronic partial conductivity is negligibly small, YSZ can be used for the construction of purely ion-conducting probes. The electrochemical processes taking place at the so-called triple phase boundary (TPB), where YSZ, an electron providing or accepting metal electrode and the gaseous phase containing oxygen meet, are studied well. Such processes include adsorption, dissociation and surface diffusion of oxygen species and charge transfer processes to reduce neutral oxygen to the oxygen anions that are mobile in YSZ. As an oxygen plasma can provide and accept electrons and also dissociated and partially reduced oxygen from the gaseous phase to the YSZ plasma interface, the TPB is reduced to a two phase boundary at such an interface, maximizing the reactive area. When employing a probe consisting of YSZ to an oxygen plasma, one expects to gather information beyond those that one can obtain with a purely electron conducting probe. The IV-characteristics should show a dependence on the concentration of various oxygen species in the plasma. Here we present the concept and design of such an ion-conducting probe, with an integrated heating system and a rectangular tip consisting of YSZ. First IV-characteristics measured with a single-probe setup in a capacitive RF discharge of various oxygen/nitrogen gas compositions are presented and compared to those of a platinum probe with comparable geometry, as a proof of principle.

Weitere Angaben

Publikationsform: Veranstaltungsbeitrag (Sonstige)
Begutachteter Beitrag: Ja
Institutionen der Universität: Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos
Fakultäten
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien
Profilfelder > Advanced Fields > Neue Materialien
Forschungseinrichtungen > Zentrale wissenschaftliche Einrichtungen > Bayreuther Materialzentrum - BayMAT
Profilfelder
Profilfelder > Advanced Fields
Forschungseinrichtungen
Forschungseinrichtungen > Zentrale wissenschaftliche Einrichtungen
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 08 Jun 2015 07:07
Letzte Änderung: 18 Apr 2018 02:48
URI: https://eref.uni-bayreuth.de/id/eprint/14839