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Heaters for LTCC-Sensors Made of Resinate Pastes

Title data

Kita, Jaroslaw ; Moos, Ralf:
Heaters for LTCC-Sensors Made of Resinate Pastes.
2007
Event: 3rd IMAPS/ACerS International Conference on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT 2007) , 23.4-26.4.2007 , Denver, Co, USA.
(Conference item: Conference , Other Presentation type)

Abstract in another language

Compared to conventional gas sensors, the LTCC technology allows reducing power consumption and structure dimensions. The miniaturization of ceramic microsystems, however, causes new problems to be solved. For example, the heated area of our already presented ceramic hot-plate gas sensor is only about 3.24 mm². A further reduction of the structure dimensions requires smaller active elements like heaters. A heater meander of a typical thick-film conductive material should have a large number of squares to achieve a reasonable resistance value. It cannot be easily printed or structured on such a small substrate area. As a solution, metallo-organic (resinate) pastes can be applied. They consist of precious metal compounds (gold, platinum) that are dissolved in organic oils. Besides their low film thickness after firing (about 1 μm or less), resinate pastes are much more highly resistive than conventional thick-films. The surface resistance for a gold ink is about 250 mΩ/sq (datasheet value). It allows constructing smaller heaters with a lower number of squares. This paper addresses the application of resinate pastes, particularly for heater applications, on LTCC. Benefits of using resinate pastes as materials for micro-heaters on LTCC are discussed and tested. The electrical properties (resistance, TCR) of gold resinate pastes on LTCC are determined in a temperature range up to 800 °C. Possible interaction between metal film and LTCC components were investigated with SEM and EDX. An example for a heater structure made of laser-patterned resinate pastes with a 355 nm Nd:YAG laser is shown.

Further data

Item Type: Conference item (Other)
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 09 Jun 2015 07:27
Last Modified: 06 Apr 2016 08:15
URI: https://eref.uni-bayreuth.de/id/eprint/14850