bei Google ScholarTitelangaben
Kita, Jaroslaw ; Rettig, Frank ; Moos, Ralf:
A Novel Method of Fabrication of Mixed LTCC-Solid Ceramic Systems.
2005
Veranstaltung: European Microelectronics and Packaging Conference EMPC 2005
, 12.-15.06.2005
, Brugge, Belgien.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung
,
Ohne Angabe
)
Abstract
Low Temperature Co-fired Ceramics Technology (LTCC) is an appropriate way to integrate three-dimensional functions in microsystems. The shrinkage of LTCC in x-y direction limits the combination of LTCC with materials or elements that have different shrinkage behavior (or that do not shrink at all during firing). Usually, such elements are added by an additional post-firing process to the LTCC structures. The recently introduced zero-shrinkage LTCC tapes can eliminate the barrier in construction of LTCC microsystems with additional non- LTCC components. This work addresses a method of fabrication zero-shrinkage LTCC tapes with conventional 96% alumina substrates as an example of mixed LTCC solid ceramic systems. In contrast to other methods, one firing step (characteristic for LTCC) was maintained. The technological process steps as well as the influence of parameters like firing temperature or applied dielectric binder and their influence on structure quality are discussed. Results of SEM microstructure analyses of LTCC ceramics and solid components are shown. In order to show the benefits of the new method, LTCC gas sensor transducers with alumina hot-plates are presented.
Weitere Angaben
| Publikationsform: | Veranstaltungsbeitrag (Ohne Angabe) |
|---|---|
| Begutachteter Beitrag: | Ja |
| Institutionen der Universität: | Fakultäten > Fakultät für Ingenieurwissenschaften Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos Fakultäten Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien Profilfelder > Advanced Fields > Neue Materialien Forschungseinrichtungen > Forschungszentren > Bayreuther Materialzentrum - BayMAT Profilfelder Profilfelder > Advanced Fields Forschungseinrichtungen Forschungseinrichtungen > Forschungszentren |
| Titel an der UBT entstanden: | Ja |
| Themengebiete aus DDC: | 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften |
| Eingestellt am: | 16 Jun 2015 08:56 |
| Letzte Änderung: | 13 Nov 2015 10:16 |
| URI: | https://eref.uni-bayreuth.de/id/eprint/15002 |