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Effect of annealing on the permittivity of ceramic films manufactured by the Aerosol Deposition Method


Schubert, Michael ; Exner, Jörg ; Stöcker, Thomas ; Hanft, Dominik ; Moos, Ralf:
Effect of annealing on the permittivity of ceramic films manufactured by the Aerosol Deposition Method.
Veranstaltung: 91. DKG Jahrestagung mit Symposium Hochleistungskeramik 2016 , 07.-09.03.2016 , Freiberg, Deutschland.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung , Poster )


The Aerosol deposition Method (ADM) is a novel ceramic coating method, which allows manufacturing dense ceramic films at room temperature directly from ceramic powders without any high temperature sintering steps and without expensive vacuum processes. Due to its deposition mechanism based on collision and densification of fine ceramic powder particles on a substrate it is also called “Room Temperature Impact Consolidation” (RTIC).Ceramic particles are accelerated up to several hundred m/s and ejected on a target. There, they build dense ceramic layers by fraction of the particles into fragments with typical crystallite sizes of about 20 nm. To investigate the influence of the AD process on the relative permittivity, several films with different materials (Al2O3, TiO2, SrTiO3 and PZT) have been deposited covering a wide permittivity spectrum. For this investigation, the materials were sprayed on an interdigital electrode structure. The capacitances of the resulting layer were measured by impedance spectroscopy. With the help of a numerical model that considers the field distributions, the permittivities were calculated. To verify these results, the same materials were sprayed on copper substrates and measured in a plate-capacitor setup. Although the results of the two electrode types were matching, the absolute values of permittivity were lower than the reported bulk material data. Thus a post-deposition annealing process was added. After annealing, all materials (except SrTiO3) showed a permittivity as expected for bulk materials. SrTiO3, however started with a by far low permittivity, which astonishingly decreased even more after annealing.

Weitere Angaben

Publikationsform: Veranstaltungsbeitrag (Poster)
Begutachteter Beitrag: Ja
Institutionen der Universität: Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos
Profilfelder > Advanced Fields > Neue Materialien
Forschungseinrichtungen > Forschungszentren > Bayreuther Materialzentrum - BayMAT
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien
Profilfelder > Advanced Fields
Forschungseinrichtungen > Forschungszentren
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 14 Mär 2016 09:59
Letzte Änderung: 18 Apr 2016 07:57
URI: https://eref.uni-bayreuth.de/id/eprint/31733