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Alternative spray-based processing methods for dielectric and piezoelectric film deposition


Deluca, M. ; Wimmer-Teubenbacher, R. ; Bruckner, Michaela ; Kita, Jaroslaw ; Moos, Ralf ; Reichmann, K. ; Maier, G. A.:
Alternative spray-based processing methods for dielectric and piezoelectric film deposition.
Veranstaltung: Electronic Materials and Applications 2017 , Jan 18-20, 2017 , Orlando, Florida, USA.
(Veranstaltungsbeitrag: Kongress/Konferenz/Symposium/Tagung , Vortrag )


Ferroelectric thin and thick films are widely used for energy harvesting and energy storage applications. Processing methods like sputtering, physical/chemical vapor deposition or chemical solution deposition (CSD) are generally used, whereby the latter has the advantage of lower cost and high flexibility with respect to the achievable range of microstructure, composition and properties. CSD methods, however, require repetition of deposition-pyrolysis-crystallization cycles to achieve desired thicknesses up to and above 1 µm. In this work, we explore the possibilities offered by two alternative deposition methods: Aerosol deposition, in which a calcined powder is sprayed at high velocity onto a substrate and consolidates upon impact, and spray pyrolysis, a CSD method in which a precursor solution is sprayed on a hot substrate and pyrolyzes on contact. We used these methods to deposit BaTiO3 films on both alumina substrates with Ag-based electrode and full sheet Cu-covered FR4 substrates. Film thicknesses up to 3 µm have been achieved. The structure and morphology of the prepared films were characterized with SEM, XRD and Raman spectroscopy. Furthermore, we characterized the dielectric and ferroelectric properties of the films, in order to clarify the potential of these deposition methods in obtaining properties comparable to those achievable with traditional processing routes.

Weitere Angaben

Publikationsform: Veranstaltungsbeitrag (Vortrag)
Begutachteter Beitrag: Ja
Institutionen der Universität: Fakultäten > Fakultät für Ingenieurwissenschaften
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien > Lehrstuhl Funktionsmaterialien - Univ.-Prof. Dr.-Ing. Ralf Moos
Profilfelder > Advanced Fields > Neue Materialien
Forschungseinrichtungen > Forschungszentren > Bayreuther Materialzentrum - BayMAT
Fakultäten > Fakultät für Ingenieurwissenschaften > Lehrstuhl Funktionsmaterialien
Profilfelder > Advanced Fields
Forschungseinrichtungen > Forschungszentren
Titel an der UBT entstanden: Ja
Themengebiete aus DDC: 600 Technik, Medizin, angewandte Wissenschaften > 620 Ingenieurwissenschaften
Eingestellt am: 13 Feb 2017 09:52
Letzte Änderung: 13 Feb 2017 09:52
URI: https://eref.uni-bayreuth.de/id/eprint/36055