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Influence of Carrier Gas Composition on the Stress of Al2O3 Coatings Prepared by the Aerosol Deposition Method

Title data

Schubert, Michael ; Exner, Jörg ; Moos, Ralf:
Influence of Carrier Gas Composition on the Stress of Al2O3 Coatings Prepared by the Aerosol Deposition Method.
In: Materials. Vol. 7 (2014) Issue 8 . - 5633 -5642.
ISSN 1996-1944
DOI: https://doi.org/10.3390/ma7085633

Official URL: Volltext

Project information

Project title:
Project's official titleProject's id
Dichte keramische Schichten ohne HochtemperaturprozessAZ-1055-12
Open Access PublizierenNo information

Project financing: Bayerische Forschungsstiftung

Abstract in another language

Al2O3 films were prepared by the aerosol deposition method at room temperature using different carrier gas compositions. The layers were deposited on alumina substrates and the film stress of the layer was calculated by measuring the deformation of the substrate. It was shown that the film stress can be halved by using oxygen instead of nitrogen or helium as the carrier gas. The substrates were annealed at different temperature steps to gain information about the temperature dependence of the reduction of the implemented stress. Total relaxation of the stress can already be achieved at 300 °C. The XRD pattern shows crystallite growth and reduction of microstrain while annealing.

Further data

Item Type: Article in a journal
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > Chair Functional Materials > Chair Functional Materials - Univ.-Prof. Dr.-Ing. Ralf Moos
Faculties
Faculties > Faculty of Engineering Science > Chair Functional Materials
Profile Fields > Advanced Fields > Advanced Materials
Research Institutions > Research Centres > Bayreuth Center for Material Science and Engineering - BayMAT
Profile Fields
Profile Fields > Advanced Fields
Research Institutions
Research Institutions > Research Centres
Result of work at the UBT: Yes
DDC Subjects: 600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 01 Dec 2014 08:44
Last Modified: 13 Apr 2016 08:47
URI: https://eref.uni-bayreuth.de/id/eprint/3845