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Determination of Temperature Coefficients of thin film Materials in RF BAW Components

Title data

Tag, Andreas ; Weigel, Robert ; Hagelauer, Amelie ; Bader, Bernhard ; Pitschi, Maximilian ; Wagner, K.:
Determination of Temperature Coefficients of thin film Materials in RF BAW Components.
In: 2015 German Microwave Conference. - Piscataway, NJ : IEEE , 2015 . - pp. 402-405
ISBN 978-3-9812-6686-3
DOI: https://doi.org/10.1109/GEMIC.2015.7107838

Abstract in another language

A new, accurate, and fast approach for determining the temperature coefficients of the thin film materials used in RF BAW components has been developed allowing the precise modeling of BAW components at different ambient temperatures. The presented method is based on the investigation of several resonance frequencies of the resonators with different layer-stacks. The problem of determining the temperature coefficients from broadband resonator simulations and measurements was formulated as an overdetermined linear system of equations and solved by using the weighted least square method. The presented approach has been verified by measurements.

Further data

Item Type: Article in a book
Refereed: Yes
Institutions of the University: Faculties > Faculty of Engineering Science
Faculties > Faculty of Engineering Science > >
Result of work at the UBT: No
DDC Subjects: 600 Technology, medicine, applied sciences
600 Technology, medicine, applied sciences > 620 Engineering
Date Deposited: 30 Sep 2019 12:28
Last Modified: 30 Sep 2019 12:28
URI: https://eref.uni-bayreuth.de/id/eprint/52406