Assessment of the novel aerosol deposition method for room temperature preparation of metal oxide gas sensor films

Titelangaben

Sahner, Kathy ; Kaspar, Michael ; Moos, Ralf:
Assessment of the novel aerosol deposition method for room temperature preparation of metal oxide gas sensor films.
In: Sensors and Actuators B: Chemical. Bd. 139 (2009) Heft 2 . - S. 394-399.
ISSN 0925-4005
DOI: https://doi.org/10.1016/j.snb.2009.03.011

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Abstract

Titania and SrTi0.7Fe0.3O3−δ sensor films were prepared by the novel aerosol deposition method at room temperature. In both cases, films with a good quality were obtained. The oxygen sensor characteristics of the devices were tested and found to be in perfect agreement with the literature. In the case of SrTi0.7Fe0.3O3−δ in particular, the aerosol deposited films did not require the additional diffusion barrier layer needed for screen-printed films, thus simplifying fabrication. In addition, propane sensitivity was determined as a function of the film thickness for the aerosol SrTi0.7Fe0.3O3−δ films.